Chapter 7 troubleshooting and maintenance, 1 troubleshooting guide, Chapter 7 – INFICON SQM-242 Thin Film Deposition Controller Card Operating Manual User Manual
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SQM-242 Operating Manual
Chapter 7
Troubleshooting and Maintenance
7.1 Troubleshooting Guide
If the SQM-242 fails to function as expected, or appears to have diminished
performance, the following Symptom/Cause/Remedy charts may be helpful.
CAUTION
The SQM-242/SAM-242 card(s) do not have any user
serviceable components.
Refer all maintenance to qualified INFICON personnel.
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