INFICON SQM-242 Thin Film Deposition Controller Card Operating Manual User Manual

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SQM-242 Operating Manual

From the user entered PID parameters, and the error history, a power output
setting is calculated using:

Sif142SetPower (long Output, double Power)

Sets the control voltage value in manual mode. If an output was in Auto mode, turns
off PID control and places the output in Manual mode.

Output. . . . . . . . . . . . . . . . . . . . . . . . Specifies which output, 0 to 13.

Power . . . . . . . . . . . . . . . . . . . . . . . . Power is between 0.0 and 1.0, representing

0 to 100% of full scale.

Sif142MapSensors (long SensLoop(0 to 23))

An array that associates each sensor (0 to 23) with an output (0 to 13) for PID
control. An output value of -1 for a sensor causes the sensor to continue to monitor
deposition, but have no effect on output control.

SensLoop () . . . . . . . . . . . . . . . . . . . Array (0 to 23) of sensor to output

assignments (0 to 13).

Sif142MapAnSensors (long AnLoop(0 to 3))

An array that associates each analog input (0 to 3) with an output (0 to 13) for PID
control. An output value of -1 for an input causes the input to continue to monitor
voltage, but have no effect on output control.

AnLoop () . . . . . . . . . . . . . . . . . . . . . Array (0 to 3) of analog input to output

assignments (0 to 13).

Sif142GetReadings (double SensorArray(0 to 23, 0 to 2),
double OutputArray (0 to 13))

Fills two arrays with measurement data. In the second dimension of the
SensorArray the elements are Rate (Å/s), Thickness (Å), and Frequency (Hz).
Negative frequency values indicate a sensor error. The OutputArray element is
output power, 0 to 1.

If a 0 is returned from this function, there are no new readings available. A non zero
value means that there is new data, with the returned value indicating the number
of readings in the buffer. The buffer is 10 readings long. To flush it, keep reading
until there is no new data.

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