INFICON SQM-242 Thin Film Deposition Controller Card Operating Manual - Manual (Page 49)

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SQM-242 Operating Manual
Period . . . . . . . . . . . . . . . . . . . . . . . . Sets the period of the measurement system
between 0.1 and 2 Seconds.
Sif142Simulate (long Mode)
Sets the operating mode. Normal mode requires SQM-242 card(s), sensors, and a
deposition power supply for proper operation. In simulate mode, no SQM-242 card
is needed. The DLL simulates the frequency readings and power output required
for PID loop control. Note that in this mode the initial sensor frequency is fixed at
5.95 MHz and at least 50% output power is required to start simulating deposition.
Mode . . . . . . . . . . . . . . . . . . . . . . . . 1 turns on simulate mode,
0 turns on normal mode.
Sif142StartMeas ()
Starts the card measuring frequency and zeros the sensor thickness reading.
Sif142ZeroSensor (long SensorNum)
Sets a sensor (0 to 23) thickness reading to zero.
Sif142Zero2 (long OutputNum)
Sets a control output (0 to 13) thickness reading to zero by setting each assigned
sensor thickness to zero.
Sif142Material (long Sensor, double Density, double
Zfact, double Tooling)
Sets up the material-specific parameters for each of the sensors.
Sensor . . . . . . . . . . . . . . . . . . . . . . . A bit weighted value of which sensor(s) the
parameter is for. For example, to set the
sensor two (of 0 to 23) place 100 in the
lowest three bits. Send 111 in the lowest
three bits to set sensors 0, 1 and 2.
Density . . . . . . . . . . . . . . . . . . . . . . . Sets the density of the material. Valid values
are from 0.4 to 99.99 gm/cc.
Zfact . . . . . . . . . . . . . . . . . . . . . . . . . Z-Ratio (Z-Factor) of the material. This is a
unitless number, and can be found in
Appendix A, Material Table . Values are from
0.5 to 25.
Tooling: . . . . . . . . . . . . . . . . . . . . . . Accounts for the difference in deposition rate
at the sensor vs. the substrate. Has a range
from 0 to 9.99, representing 0 to 999%.