INFICON SQM-242 Thin Film Deposition Controller Card Operating Manual - Manual (Page 50)

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SQM-242 Operating Manual
Sif142GetMaterial (double SensorParams (0 to 23, 0 to 2),
double SystemParams (0 to 4)
Read material parameters: density, Z-Ratio, and tooling (0 to 23, 0 to 2) and system
parameters: max freq, min freq, init freq, period, norm/sim (0 to4)
Sif142FullScale (long Output, double FullScaleVolts,
double MaxPwr, double SlewRate)
Sets the source output operating parameters.
Output . . . . . . . . . . . . . . . . . . . . . . . The output these parameters are for, 0 to 13.
FullScaleVolts. . . . . . . . . . . . . . . . . . Maximum voltage the output is scaled to.
This is the output at 100% power. Values
from -10 to +10 are valid.
MaxPwr . . . . . . . . . . . . . . . . . . . . . . Maximum power that the loop is allowed to
output, expressed as 0.0 to 1.0 (representing
0% to 100%)
SlewRate: . . . . . . . . . . . . . . . . . . . . Maximum rate of change that the output can
change, expressed as (Percent of full scale x
0.01 / Second).
Sif142Auto (long Output)
Exits manual power control and starts the control loop running on the indicated
output channel.
Output . . . . . . . . . . . . . . . . . . . . . . . 0-11, indicating the output to place in PID
control.
Sif142Loop2 (double Rate, double P, double I, double D,
long Output)
Sets the control loop parameters for an output. The sensors specified in the
Sif142MapSensors function are averaged to provide the input parameters to the
PID loop.
Rate . . . . . . . . . . . . . . . . . . . . . . . . . Specifies the rate that we wish to control to,
from 0 to 999.9 Angstroms/Second.
P. . . . . . . . . . . . . . . . . . . . . . . . . . . . Proportional (gain) term of the PID loop. A
unitless number from 0 to 9999.
I . . . . . . . . . . . . . . . . . . . . . . . . . . . . Integral term, from 0 to 99.9, expressed in
seconds.
D. . . . . . . . . . . . . . . . . . . . . . . . . . . . Derivative term, from 0 to 99.9, expressed in
seconds.
Output . . . . . . . . . . . . . . . . . . . . . . . The output (0 to 13) the parameters apply to.