B - 2 – INFICON Composer Elite Gas Concentration Monitor User Manual
Page 148
B - 2
PN
07
4-
56
6-
P1
B
Composer Elite Operating Manual
nitrogen
N
2
28.010
1.399
oxygen
O
2
32.000
1.395
phosphoryl trichloride
POCl
3
153.330
1.168
silicon chloride hydride
SiHCl3
135.450
1.123
silicon fluorine hydrogen
SiFH
3
50.100
1.213
silicon hexafluride
SiF
6
142.080
1.127
silicon tetrachloride
SiCl
4
169.900
1.101
silicon tetrabromide
SiBr
4
347.702
1.094
tetraethyl orthosilicate
TEOS
208.260
1.200
tetrafluoroethane
R134a
102.000
1.120
tetrakis(diethylamino)titanium
TDEAT
336.100
1.200
tetrakis(dimethylamido)titanium
TDMAT
224.000
1.200
trichlorosilane
SiHCl
3
135.450
1.123
triethylgallium
TeGa
156.930
1.120
trimethylaluminum
TMAl
72.090
1.230
trimethylgallium
TMGa
114.830
1.103
trimethylindium
TMIn
159.93
1.120
tungsten hexafluoride
WF
6
297.830
1.075
Table B-1 Material table (continued)
Gas Name
Formula
Molecular
Weight
Gamma
Factor