INFICON Composer Elite Gas Concentration Monitor - Manual (Page 22)

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Composer Elite Operating Manual
1.5 Specifications
1.5.1 Composer Elite System Operating Specifications
Operating Pressure Range . . . . . . . 26.7 to 133.4, kPa [200-1000 Torr] absolute
Routine Overpressure Rating. . . . . . Up to 202.7 kPa [1520 Torr] absolute
Maximum Overpressure. . . . . . . . . . 826.2 kPa [6200 Torr] absolute.
Pressure over 826.2 kPa may damage
Acoustic Sensor diaphragms.
Gas Flow Range
Standard Acoustic Sensor
(for H2 and He carrier gas). . . . . 0 to 2000 sccm,
pressure drop at 2000 sccm flow is
approximately 12 Torr [1.60 kPa] at standard
temperature and pressure
High Flow Acoustic Sensor
(for N2 carrier gas or
higher molecular weight) . . . . . . 1000 to 2000 sccm,
pressure drop at 2000 sccm flow is
approximately 6 Torr [0.80 kPa] at standard
temperature and pressure.
Measurement Stability . . . . . . . . . . . 1 hour drift: +/- 0.032 Hz after 1 hour
stabilization (equivalent to +/- 2.5 ppm
Cp2Mg in N
2
). 8 hour drift: +/- 0.025 Hz after
2 hour stabilization
Determined using a N
2
carrier gas at
60°C, 800 Torr, 100 sccm flow
Measurement Rate. . . . . . . . . . . . . . 1 second
Concentration Reproducibility . . . . . <3 x 10-6 molar TMIn equivalent in H
2
[<2.4 x 10-5 molar TMIn equivalent in N
2
]
Sensitivity . . . . . . . . . . . . . . . . . . . . . Carrier at 60°C, 800 Torr, 100 sccm flow,
0.00011% of TMIn in H
2
[0.0008% of TMIn
in N
2
]
Time to Operation from
Room Temperature . . . . . . . . . . . . . For five Acoustic Sensors from ambient
temperature to the "at temperature" condition
is 120 minutes. Three or fewer sensors
typically require 90 minutes or less.
Reliability and Serviceability. . . . . . . Mean Time Between Failure: >8000 hours