3 acoustic sensor – INFICON Composer Elite Gas Concentration Monitor User Manual

Page 24

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1 - 10

PN

07

4-

56

6-

P1

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Composer Elite Operating Manual

1.5.3 Acoustic Sensor

Size . . . . . . . . . . . . . . . . . . . . . . . . . 124 mm (4.88 in.) between VCR-4 seal

surfaces. Maximum outline dimensions
W x H x D (with gaskets and caps)
77.7 x 149.9 x 185.4 mm
(3.06 x 5.90 x 7.30 in.)

Measurement Principle . . . . . . . . . . Precursor concentration determined by

precision measurement of speed of sound in
a temperature controlled volume.
Measurement quality is enhanced by a
multi-chamber Helmholtz type resonator

Materials in Contact with Process Gas

Sensor Body. . . . . . . . . . . . . . . . 316L Stainless Steel

Tubing . . . . . . . . . . . . . . . . . . . . Seamless 316L SS and automatic butt weld

fittings

Isolation Diaphragms . . . . . . . . . 0.017 mm (0.00067 in.) Inconel

®

X-750,

sealed with Inconel 718 gold plated c-rings

Connection to Process
Gas System . . . . . . . . . . . . . . . . . . . Swagelok

®

VCR

®

-4 male; inlet and outlet

inline 124 mm (4.88 in.) seal face to seal
face, near zero clearance required

Leak Test Service
Port Connection . . . . . . . . . . . . . . . . Swagelok VCR-2 female

Swept Volume . . . . . . . . . . . . . . . . . Resonant chamber: 8.9 cc

Connecting Inlet and Outlet tubes
(combined volume): 3.7 cc

Total Swept Volume . . . . . . . . . . 12.6 cc

Operating Temperature Range. . . . . 5°C minimum above ambient, range 30°C to

65°C, heat mode only

Maximum Leak Rate . . . . . . . . . . . . 1x10

-9

cm

3

/s helium

Electrical Connection . . . . . . . . . . . . 15-pin high-density D-sub

to Sensor Control Unit

Required Connector Clearance . . . . Required clearance 76.2 mm (3 in.) one side

for electrical connector removal or insertion

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