Indications 7, Symbols of vacuum technology, Definition of terms – INFICON UL5000 Dry Helium Leak Detector User Manual

Page 7: 2 indications, 3 symbols of vacuum technology, 4 definition of terms

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General Information

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1.1.2

Indications

Tipp

Information on helpful procedures.

Notice: Information on special technical requirements that the user must comply

with.

The references to diagrams consists of the Chapter number, figure number and the
item number in this order. For example: Fig. 2-4/7 refers to item 7 in the figure 4 of
Chapter 2.

1.1.3

Symbols of Vacuum Technology

Given in the following are some important vacuum symbols which are used in this
manual.

Vacuum pump in general

Turbomolecular pump

Pressure gauge

Valve

1.1.4

Definition of Terms

Autoranging

The range of the preamplifier and the vacuum ranges are selected automatically.

The autoranging feature of the UL5000 covers the entire range or leak rates
depending on the selected operating mode. Not only the leak rate signal, but also the
pressure in the test sample (inlet pressure P1) and the fore vacuum pressure (P2)
are used for control purposes. Range switching between the main ranges is
performed via valves. Fine range switching within the main ranges is implemented
by switching over the gain factor of the preamplifier.

Autotune Mass alignment

This function automatically aligns the mass spectrometer so that a maximum leak
rate is displayed. The control processor changes the voltage which erates the ions
in the selected mass range until a maximum ion current is detected by the ion
detector. During each calibration the mass alignment is run automatically.

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