INFICON UL5000 Dry Helium Leak Detector User Manual

Page 84

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84

Error And Warning Messages

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E34

24V voltage at MSV board is
too low!

Signal MVPZN on the MSV board is active. 24 V signal voltage is too low,
U < 18.3 V.

Fuse F1 on the MSV board has blown.

24 V power supply voltage is missing.
Switch off the UL5000!
The missing voltage will cause the exhaust valve on the scroll pump to
close which in turn can lead to a contamination of the vacuum system.

Reference voltage UREF on the MSV board XT7/1 is too high, U > 5 V.

E35

Anode-cathode voltage is too
high!

MSV board is faulty.

Anode-cathode voltage is higher than 130 V.

E36

Anode-cathode voltage is too
low.

MSV board is faulty.

Anode-cathode voltage is lower than 30 V.

E37

Suppressor voltage reference
value too high!

Signal MFSZH on MSV board is active. Suppressor signal command
variable is too high.

Suppressor voltage has a short circuit.

MSV is faulty.

E38

Suppressor potential too
high!

Suppressor potential is higher than 363V.

MSV board is faulty.

E39

Suppressor potential is too
low

Suppressor potential is lower than 297V.

MSV board is faulty.

E40

The anode potential exceeds
its nominal value by over
10%!

The actual anode potential exceeds its nominal value by 10%. The
nominal value can be displayed in the service menu.

MSV is faulty.

E41

The anode potential has
dropped below its nominal
value by over 10%!

The actual anode potential has dropped below its nominal value by 10%.
The nominal value can be displayed in the service menu.

Air inrush.

MSV is faulty.

E42

Nominal value of the anode
potential is too high!

Signal MFAZH on MSV board is active.

Anode voltage has been short circuited.

Nominal value of the anode voltage is too high. Anode voltage is limited
to about 1,200 V.

E43

Cathode current is too high!

Signal MPKZH on MSV board is active. Cathode current is too high, I
> 3.6 A.

MSV is faulty.

E44

Cathode current is too low!

Signal MPKZN on MSV board is active. Cathode current is too low, I >
0.2 A.

MSV is faulty.

W45 Emission for cathode 1 can

not be switched on!

Signal MSIBE on MSV board is not active. Emission for cathode 1 can not
be switched on. UL5000 switches to cathode 2. Please order a new ion
source.

W46 Emission for cathode 2 can

can not be switched

Signal MSIBE on MSV board is not active. Emission for cathode 2 can not
be switched on. UL5000 switches to cathode 1. Order a new ion source.

No.

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Description and possible solutions

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