INFICON SQM-242 Thin Film Deposition Controller Card Software Operating Manual - Manual (Page 11)

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SQS-242 Operating Manual
Chapter 1
Introduction
1.1 Introduction
The SQS-242 Deposition Control Software, see Figure 1-1 , works with the
INFICON SQM-242 card to provide a powerful, PC based thin film deposition
controller that can:
 Measure up to eight quartz crystal sensors simultaneously.
 Control up to six deposition source supplies simultaneously (CoDeposition).
 Provide PreConditioning, multiple rate ramps, and feed/idle phases.
 Graph deposition rate, rate deviation, or power output.
 Store process, film and material parameters in Microsoft Access ® database
 Provide flexible and reliable digital I/O using an inexpensive PLC (PLC not
provided by INFICON).
Figure 1-1 SQS-242 Software