INFICON SQM-242 Thin Film Deposition Controller Card Software Operating Manual - Manual (Page 40)

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SQS-242 Operating Manual
3.5.1.1 Layer Tab
Figure 3-9 Layer Tab
Film DropDown Box: Assigns a film to the selected layer. A film is basically a
Material, plus the other settings shown on the Deposit, Condition, Source/Sensor,
and Error tabs.
Output DropDown Box: Selects the output that is used for deposition of the
selected layer’s film. A particular film often uses the same output (i.e., a thermal
boat or E-Beam pocket).
NOTE: Due to the way outputs are stored in the process database, the physical
output number (not its name) is listed in the layers listing. Outputs 1 and 2
refer to the first SQM-242 card outputs. Outputs 3 and 4 refer to the second
SQM-242 card outputs (if installed). Outputs 13 and 14 are the SAM-242
card outputs (if installed).
Input DropDown Box: Selects the input used to measure and control deposition
of the selected layer. The combination of an output and its input defines the
deposition “control loop” for the selected layer. The Input selection can significantly
alter operation of the deposition phase, as described in the following discussion on
the SetPt parameter.