INFICON SQM-242 Thin Film Deposition Controller Card Software Operating Manual User Manual
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SQS-242 Operating Manual
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Analog/Outputs 5-6 Register (updated each layer)
Bits 0-3 are analog inputs used (1=used, 0=unused)
Bits 4-5 outputs used, 4 is Out5, 5 is Out6
Bits 8-11 are BCD of Output source index
Bits 12-15 are BCD of Output 6 source index
220
Source Index Register (updated each layer)
Bits 0-3 are BCD of Output 1 source index
Bits 4-7 are BCD of Output 2 source index
Bits 8-11 are BCD of Output 3 source index
Bits 12-15 are BCD of Output 4 source index
221
Source Indexer Done Flag
Bit 0 is Source Indexer 1 (1= Indexer Done, 0=Not Done)
Bit 1 is Source Indexer 2
Bit 2 is Source Indexer 3
Bit 3 is Source Indexer 4
Bit 4 is Source Indexer 5
Bit 6 is Source Indexer 6
222
Relays 1-16
Bit 0 is Relay 1, etc.
224
Inputs 1-12
Bit 0 is Input 1, etc.
225
Layer Index Register
Bits 0-3 are BCD of Layer Indexer 1
Bits 4-7 are BCD of Layer Indexer 2
Bits 8-15 are BCD of Layer Indexer 3
226
Layer Indexer Done Flag
Bit 0 is Layer Indexer 1 (1= Indexer Done, 0=Not Done)
Bit 1 is Layer Indexer 2
Bit 2 is Layer Indexer 3