INFICON SQM-242 Thin Film Deposition Controller Card Software Operating Manual - Manual (Page 20)

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SQS-242 Operating Manual
2.2.6 Edit Source/Sensor
25 Select the Source/Sensor tab. See Figure 2-8
Figure 2-8 Source/Sensor tab
26 Select the proper material for this film, Gold.
27 Set the maximum power and slew rate that should be used for the selected
material.
28 Sensor Tooling adjusts for differences in the substrate deposition and that
measured by each sensor. Select 100% for now.
2.2.7 Edit Errors
29 Select the Errors tab, see Figure 2-9 , to control the actions taken when a
sensor or deposition control error occurs. You can elect to ignore errors
(unlikely), stop deposition for this layer, or continue deposition at a fixed power
level. Select Stop Layer for this example.
Figure 2-9 Errors tab
30 Until a process is well established, it is best to enable only the Crystal Fail error
checking. Uncheck the remaining error conditions.