3 query/update layer – INFICON SQM-242 Thin Film Deposition Controller Card Software Operating Manual User Manual
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SQS-242 Operating Manual
11
Set Active Layer #
2n
Output n (1 to 6) Power (Manual Mode Only)
4n
Map Sensor n to Output #
50
Set DataLog filename without extension (Stop mode only)
51
DataLog type (0=None, 1=Overwrite, 2=Append, 3=Run#)
52
DataLog Interval in seconds (set Bit 3 in Command 53 below)
53
DataLog Events (bit weighted integer)
Bit 0 End Deposit Phase
Bit 1 End Each Phase
Bit 2 I/O Event
Bit 3 Timed
Bit 8 Every Reading
Bit 9 Sensor Readings
Bit 10Analog Readings
5.8.3 Query/Update Layer
@QL;<param1>;<layer>;<output>
@UL<param1>;<layer>;<output>
NOTE: A <layer> value of zero sets/returns data on the current layer.
where <param1> is:
01
Film Name
Example: @UL;01;1MyFilm,New Film
(set Layer 1, MyFilm to
NewFilm)
02
Setpoint
Å/s, V, or % Power
03
Start Thickness
kÅ
04
Time SP
mm:ss
05
Thickness SP
kÅ
06
Start Mode
0/1
07
Substrate Index (obsolete)
0 to 15
08
# Layers in Process (query)
09
Start Prompt
250 characters or less
10
Phase of the requested output (query)
1n
Ramp n Start Thickness, n=1 to 9
kÅ
2n
Ramp n Ramp Time, n=1 to 9
mm:ss
3n
Ramp n New Rate, n=1 to 9
Å/s
41
Layer Indexer 1 Index
0 to 15
42
Layer Indexer 2 Index
0 to 15
43
Layer Indexer 3 Index
0 to 15
44
Source Indexer Index
0 to 15
45
Input Type (Sensors=0, TimedPower=1, Analog1-4 = 2-5)
46
System Configuration
47
Source Indexer Done
0/1
48
Layer Indexer 1 Done
0/1
49
Layer Indexer 2 Done
0/1
50
Layer Indexer 3 Done
0/1