8 save edits, 3 single layer process simulation – INFICON SQM-242 Thin Film Deposition Controller Card Software Operating Manual User Manual

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SQS-242 Operating Manual

2.2.8 Save Edits

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Select the Close Form SoftKey to save this one-layer process. If you are
prompted Do you want to change…. answer Yes to make this the current
process.

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Your new single-layer process is now the active process in the main window.
Notice the process, layer, and time information above the graph.

2.3 Single Layer Process Simulation

If you have followed this chapter, you are ready to simulate a deposition process.
First, take a look at the information provided on the main dialog box. See

Figure

2-10

.

Figure 2-10 Information on Main Dialog Box

Process

Name

Elapsed Time

Run Number

Layer

Number

Elapsed Time

Phase

Name

Time Elapsed/Remaining

Percent Complete

Film(s)

Operating

Soft Keys

Film

Film

Measurements

Settings

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