8 save edits, 3 single layer process simulation – INFICON SQM-242 Thin Film Deposition Controller Card Software Operating Manual User Manual
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SQS-242 Operating Manual
2.2.8 Save Edits
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Select the Close Form SoftKey to save this one-layer process. If you are
prompted Do you want to change…. answer Yes to make this the current
process.
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Your new single-layer process is now the active process in the main window.
Notice the process, layer, and time information above the graph.
2.3 Single Layer Process Simulation
If you have followed this chapter, you are ready to simulate a deposition process.
First, take a look at the information provided on the main dialog box. See
Figure 2-10 Information on Main Dialog Box
Process
Name
Elapsed Time
Run Number
Layer
Number
Elapsed Time
Phase
Name
Time Elapsed/Remaining
Percent Complete
Film(s)
Operating
Soft Keys
Film
Film
Measurements
Settings
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