INFICON SQM-242 Thin Film Deposition Controller Card Software Operating Manual - Manual (Page 19)

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SQS-242 Operating Manual
2.2.4 Edit Deposition
18 Select the Deposit tab. See Figure 2-6 .
Figure 2-6 Deposit tab
19 Set gain (P Term) to 55.
20 Set time constant (I Term) to 0.7.
21 Set dead time (D Term) to 0.
22 Be sure Shutter Delay Enabled is not selected.
23 Set Rate Sampling to Continuous.
2.2.5 Edit Pre/Post Conditioning
24 Before deposition begins, the source material is often brought to a ready state
by slowly raising the evaporation source power. Select the Condition tab and
set each parameter to the values shown in
Figure 2-7 .
Figure 2-7 Condition tab