INFICON SQM-242 Thin Film Deposition Controller Card Software Operating Manual - Manual (Page 82)

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SQS-242 Operating Manual
5.8.6 Update Utility
@QU;<param1>;<Index>
02
SQM242 Mode (0/1)
03 SQM242 Period
04 SQM242 Filter
06 Front Panel Enabled (0/1)
07 Application Visible (0/1)
08 Full Scale Output (Index=1 to 6)
14 Application On Top(0/1)
5.8.7 Query Measurement
@QM;<param1>
1n
Output n Power (n=1 to 6)
2n Output n Rate
3n Output n Thickness
4n Output n Deviation
5n Sensor n Rate (n=1 to 8)
6n Sensor n Thickness
7n Sensor n Frequency
8n Sensor n % Life
9n Analog Input n Voltage
5.8.8 Query Register
@QR;<param1> (returns register value in HEX)
0
Layer/Phase Register
1 Sensor/Output Register
2 Analog/Output Register
20 Source Index Register
21 Source Index Done Register
22 Relay Register
24 Input Register
25 Layer Index Register
26 Layer Index Done Register
5.8.9 Update Register
@UR;<param1>;<value> (value in HEX)
0
Layer/Phase Register
1 Sensor/Output Register
2 Analog/Output Register
20 Source Index Register
21 Source Index Done Register
22 Relay Register
24 Input Register
25 Layer Index Register
26 Layer Index Done Register
XXX Any Register