INFICON SQM-242 Thin Film Deposition Controller Card Software Operating Manual - Manual (Page 29)

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SQS-242 Operating Manual
Try a P Term in the 25-30 range (less gain) for both Gold and Silver to decrease
the loop susceptibility to noise. Increasing the I Term a little, say toward 1.0, will
lessen overshoot during rate changes. The D term can be thought of as a “dead
band” term. Most systems require little or no D term.
2.6 Conclusion
Spend some time with this process to become familiar with its setup and the effect
of changes on deposition performance.
Because we selected Simulate Mode at the beginning of this Quick Start session,
the SQM-242 card is “faking” an actual process. You can use the Simulate feature
at any time to become familiar with SQS-242 operation and the effect of various
settings on process performance. It is also a very useful feature for pre-testing your
process setups. Return to the Edit menu, then select System and set the Mode to
Normal to begin running your real process with the SQS-242 software.