5 multi-layer codeposition process – INFICON SQM-242 Thin Film Deposition Controller Card Software Operating Manual User Manual
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SQS-242 Operating Manual
2.5 Multi-Layer CoDeposition Process
Our final example builds on the previous sections. If you have modified the setup
of your process, return to
section 2.2, Single-Layer Process Setup, on page 2-2
and adjust the process to those values. When your single-layer process matches
, complete these steps:
1
Duplicate a Layer
Open the Edit Process dialog box. Click on Layer 1, click the Layer tab, then
click Copy Layer. Now click Paste Layer. A duplicate Gold Sample film will be
added as Layer 2. Click Paste Layer again to add a third Gold Sample layer.
2
Select a CoDep Film
Select Layer 3 in the layers list. Select Films >> Silver Sample. Select Output
>> Output 2. The layers list will update to show the new Silver Sample film
assigned to Layer 3.
3
Add a CoDep Layer
Select Layer 3 in the layers list, then click Cut Layer. Now select Layer 1. Click
Paste CoDep. The Silver Sample film will be added below Gold Sample as a
codeposition layer. Your setup should match
.
Figure 2-13 Added CoDep Layer