4 query/update film, 5 query utility – INFICON SQM-242 Thin Film Deposition Controller Card Software Operating Manual User Manual
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SQS-242 Operating Manual
5.8.4 Query/Update Film
@QF;<param1>;<layer>;<output>
@UF;<param1>;<layer>;<output>;<value>
Note: <layer>=0 is active layer
where <param1> is:
01
P Term
02
I Term
03
D Term
04
Shutter Delay Status (0/1)
05
Shutter Timeout
06
Shutter Accuracy
07
Control Error Status (0/1/2)
08
Control Error Accuracy
09
Rate Sampling Status (0/1/2)
10
Sample Accuracy
11
Sample Time
12
Sample Hold
13
Ramp 1 Power
14
Ramp 1 Time
15
Soak 1 Time
16
Ramp 2 Power
17
Ramp 2 Time
18
Soak 2 Time
19
Feed Power
20
Feed Ramp Time
21
Feed Time
22
Idle Power
23
Idle Ramp Time
24
Output (1-6)
25
Source Index (obsolete)
26
Max Power
27 Slew
Rate
28
Material
3n
Tooling n (n=1 to 8)
40
AutoSoak2 (0/1)
5.8.5 Query Utility
@QU;<param1>
01
SQM242 DLL Version
02
SQM242 Mode (0/1)
03
SQM242 Period
04
SQM242 Filter
05
SQM242 Number of Cards Installed
06
Front Panel Enabled (0/1)
07
Application Visible (0/1)
11
SQS-242 Software Version
12
SQS-242 Operating System
13
SQS-242 Computer Name