INFICON SQM-242 Thin Film Deposition Controller Card Software Operating Manual - Manual (Page 54)

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SQS-242 Operating Manual
3.5.4.4 Indexers Tab
Figure 3-21 Indexers tab
Source Indexers: A unique source indexer (pocket rotator) is available for each
output used. The source indexer moves at the beginning of each layer.
Layer Indexers: Three “layer indexers” are also available. Layer indexers also
move at the beginning of each layer. Layer indexer values are useful for control of
substrate indexers or other external process equipment.
NOTE: The Layer Indexer names, the range of values, and the first entry can be
customized by editing entries in the SQS242.INI file (see section 3.8 ).
Complete Signal: Check this box if your indexer sends a signal indicating that the
move is complete.
Timeout: If Complete Signal is checked, the process will halt if a move complete
signal is not received within this timeout period. If Complete Signal is not checked,
the process waits for this fixed time period before starting a layer.
Move: Useful for testing indexer functions manually. Select an indexer, then an
index (pocket). Click Move to move to the selected index. Layer indexers are
typically named Substrate, User 1, and User 2. Layer indexer names can be edited
in the SQS242.INI file (see
section 3.8 ).
3.5.4.5 I/O Tab
A PLC must be used to provide digital I/O capabilities. The I/O tab assigns
deposition events (i.e., open shutter, start deposit, final thickness, etc.) to the
physical relays and inputs on the PLC.