INFICON SQM-242 Thin Film Deposition Controller Card Software Operating Manual - Manual (Page 23)

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SQS-242 Operating Manual
2.3.3 Preconditioning Phases
Because we selected Automatic in the View menu, the graph displays Output
Power during preconditioning, then switches to Rate during the deposition phase.
As shown in Figure 2-12 , the initial deposition rate was 10 Å/s until a thickness of
.400 kÅ. Then the deposition rate was ramped up to 15 Å/s, and held until the
desired final thickness of 1.000 kÅ was achieved. At this point, this single-layer
process is finished.
Figure 2-12 Deposition Rate
2.3.4 Deposition Phase with one Rate Ramp
You should adjust the PID parameters on the setting ribbon, then Start/Stop the
process several times to become familiar with their effect on control loop response.
NOTE: In Simulate Mode, a deposition rate is not “measured” until the output
power exceeds 50%.