INFICON SQM-242 Thin Film Deposition Controller Card Software Operating Manual - Manual (Page 48)

3 - 18
IP
N 07
4-
55
1-
P1
A
SQS-242 Operating Manual
If Continuous Start is selected the analog input controls to its programmed Layer
Setpoint through all of the Ramp/Soak/Feed phases. This allows temperature or
pressure control (for example) to be maintained through all phases of the layer. If
Stop Layer is selected, control is still maintained at setpoint. Pressing Abort
Process will set the output to zero.
Rate Ramps Tab: Setpoint ramps can also be programmed for an analog signal.
Deposition Tab: The PID and Shutter Delay controls operate the same as a
Sensor input. Rate sampling is not possible for analog inputs.
Condition Tab: Conditioning is identical to that of a Sensor input.
Source/Sensor Tab: Only Max Power and Slew Rate are functional.
Errors: Only Control Error applies.
The Analog Input’s measured value (converted to the defined units) and deviation
from setpoint are shown below the graph. The analog input values are NOT shown
on the normal Rate graph (the values could lead to poor rate resolution on the
graph). Instead the analog input voltages are shown on the View, Analog graph.
Volts are displayed on this graph, rather than the scaled units (again, to maintain
adequate graph resolution).
3.5.2 Edit: Films
The Edit Films dialog, see Figure 3-15 , allows you to rename, delete, and copy
films. The functions in the tabbed control are identical to those for this film on the
Edit Processes dialog.
NOTE: Edits to a Film will affect all processes and layers that use that film!
Figure 3-15 Film Edit dialog