INFICON SQM-242 Thin Film Deposition Controller Card Software Operating Manual - Manual (Page 79)

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SQS-242 Operating Manual
5.8 Command Summary
NOTE: Update commands (except UP02-UP10) are only valid in Stop Mode.
5.8.1 Query Process
@QP;<param1>
where <param1> is:
01
Process Name
Example Query: @QP;01
Example Response: @QP;06;MyProc(Process is MyProc)
02 Process Time (mm:ss)
03 Active Layer #
04 Layer Time (mm:ss)
05 Phase # (where phase numbers returned are)
00 Application Startup
09 ShutterDelay Phase
01 Program Initialize 10 Deposit Phase
02 Not Used 11 Layer Stopped
03 Not Used 12 Layer Starting
04 Process Stopped 13 Not Used
05 Ramp1 Phase 14 Feed Ramp Phase
06 Soak1 Phase 15 Feed Hold Phase
07 Ramp2 Phase 16 Idle Ramp Phase
08 Soak2 Phase 17 Idle Phase
06 Phase Time (mm:ss)
07 Run #
08 All Process Names (comma delimited list)
1n Source Shutter Status, n=1 to 6 (0=Open, 1=Close)
2n Sensor Shutter Status , n=1 to 8 (0=Open, 1=Close)
30 All Crystal Good Status (0=False, 1=True)
3n Crystal n Good, n=1 to 8 (0=False, 1=True)
39 All Crystal Fail (0=False, 1=True)
4n Sensor to Output Map, n=1 to 8
50 DataLog Filename
51 DataLog Type (0=None, 1=Overwrite, 2=Append, 3=Run#)
52 DataLog Interval in seconds
5.8.2 Update Process
@UP;<param1>;<data>
where <param1> is:
01
Set Process
Example Update @UP;01;MyProc(Select MyProc)
Example Response: @UP;06;
02 Start Process
03 Stop Process
04 Start Layer
05 Stop Layer
06 Start Next Layer
07 Auto Mode (all films in layer)
08 Manual Mode (all films in layer)
09 Zero Thickness (all films in layer)
10 Set Run #