INFICON SQM-242 Thin Film Deposition Controller Card Software Operating Manual - Manual (Page 63)

3 - 33
IP
N 07
4-
55
1-
P1
A
SQS-242 Operating Manual
NOTE: The Sensor Readings dialog box can be sized to also show SAM-242 card
analog input readings and digital I/O information. The digital I/O
information is useful for troubleshooting I/O problems during setup.
Rate Graph: Fixes the main graph to deposition rate. Deposition rate is useful
during the shutter delay, rate ramp, and deposition phases. During other phases,
the power output graph is usually more useful.
Deviation Graph: Fixes the main graph to display percent deviation from the rate
setpoint. Rate deviation is useful for fine tuning the PID control loop.
Power Graph: Fixes the main graph to output power. Output power is directly
adjusted during the PreConditioning, feed, and hold phases. Output power is also
useful during the deposition phases to detect error conditions, which cause
oscillations. Be sure the Full Scale voltage is set properly in the SQM-242 Setup
menu.
Sensors Graph: Normally the graph displays output, or film-based information.
The Sensors Graph selection displays the rate readings from each individual
sensor assigned to a system setup. It is a graphical display of the Rate column of
the Sensor Readings dialog box.
Analog Graph: If an SAM-242 analog input card is installed, this graph shows the
voltage readings from each analog input assigned to a system setup.
Automatic: Changes the main graph to display the most pertinent information for
each deposition phase. During preconditioning, output power is displayed. During
shutter delay, rate ramps, and deposition, the main graph displays deposition rate.
During feed and hold phases, the graph reverts to output power.
NOTE: To alter the appearance of a graph, right-click anywhere on the graph. Use
the Graph Property Page dialog box to alter the graph to your preferences.
To permanently save the changes, click the Control tab, the General tab,
then the Save button. Save the graph setup to the appropriate .OC2 file for
the graph you are modifying.
High Resolution: When this option is checked, rate is displayed to 0.01 Å/s, and
thickness to 0.1kÅ. This can be useful for low rate applications, but annoying for
moderate rates. The SQM-242 card resolution for PID control is unchanged.
3.7 Software Specifications
Display
Graphs . . . . . . . . . . . . . . . . . . . . . . . Rate, Deviation, Power
Readouts . . . . . . . . . . . . . . . . . . . . . Rate, Dev, Thick, Power
Process Parameters
Name . . . . . . . . . . . . . . . . . . . . . . . . 12 characters