INFICON Sensistor ILS500F Leak Detection System - Manual (Page 4)

Content 4
ninp69e1-a (1410)
9.2 Maintenance 63
9.3 Functional Verification 69
10 Service 70
11 Technical Data 71
11.1 Electrical Specifications 71
11.2 Pneumatic Specifications 72
11.3 Other Data 73
11.4 Interfaces and Connectors 74
12 Spare Parts and Accessories 84
13 Support from INFICON 85
13.1 How to Contact INFICON 85
13.2 Returning Components to INFICON 85
14 Declaration of Conformity 86
15 Declaration by the Manufacturer 87
Appendix
A: Parameter Index 88