INFICON Sensistor ILS500F Leak Detection System - Manual (Page 56)

Troubleshooting 56
ninp69e1-a (1410)
Manifold Tightness (gross)
The overall tightness of the manifold is tested using the pressure decay method. This is
a complement to the gas test, revealing leakage out, through the exhaust etc.
Possible results:
• No Internal Leakage
• Internal Leakage
Internal leakage can result in:
• False pressure and vacuum decay rejects
• Increased tracer gas consumption
Evacuation Valve
This step tests that evacuation valve opens to release tracer gas to exhaust. Same test
as previously but under pressure instead of vacuum.
Possible results:
• Valve works
• Faulty!
Malfunction will result in:
• Failure to terminate test cycle
Hardware Test
CONTINUE STOP
Vacuum:
Pressure:
0.00 bar
bar
Manifold Tightness
0.46
Internal Leakage
Hardware Test
CONTINUE STOP
Vacuum:
Pressure:
0.00 bar
bar
Evacuation Valve
0.00
Valve works!