Test step, 2 pre evacuation – INFICON Sensistor ILS500F Leak Detection System User Manual
Page 42
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Recipes
42
ninp69e1-a (1410)
Test Step
1
See Connection Step 1 - 3 above and follow the instructions.
7.3.2
Pre Evacuation
Test Step
Tooling Outputs
ON
Condition for starting test
and Tooling Inputs
Info
Delay
1
2
3
4
0.0
Pre Evacuation
Pre Evacuation Setpoint
Extended Pre Evacuation
-0.70
0,0
bar
s
Pre Evacuation Setpoint
A value of -0.70 bar (-0.07 MPa, -10 psi) is
adequate for most applications. This creates 70%
vacuum.
Extended Pre Evacuation
To ensure a complete filling. Evacuation will
continue for the set time after Evacuation Level has
been attained.
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