INFICON SID-242 Thin Film Deposition Controller - Manual (Page 18)

Chapter 2 Quick Start
2-6
The diagram below illustrates a complete deposition cycle for a single layer. Refer to
this diagram as we set the remaining process setup parameters.
Edit
Rate Ramps It may be desirable to vary the deposition rate during a layer.
For example, to deposit slowly at first, then more quickly once
the initial material is deposited. Click the “Rate Ramps” tab,
then click “Insert Ramp.” Adjust the “Start Thickness” to 0.400
kÅ, “Ramp Time” to 5 seconds, and “New Rate” to 15 Å/s.
Edit Pre/Post
Conditioning Before deposition begins, the source material is often brought
to a ready state by raising the evaporation source power.
Select the “Condition” tab and set each parameter to the
values shown below.