INFICON SID-242 Thin Film Deposition Controller - Manual (Page 89)

Chapter 6 Computer Interface
6-8
@UF;<param1>;<layer>;<output>;<value>
<param1>
01
P Term
02 I Term
03 D Term
04 Shutter Delay Status (0/1)
05 Shutter Timeout
06 Shutter Accuracy
07 Control Error Status (0/1/2)
08 Control Error Accuracy
09 Rate Sampling Status (0/1/2)
10 Sample Accuracy
11 Sample Time
12 Sample Hold
13 Ramp 1 Power
14 Ramp 1 Time
15 Soak 1 Time
16 Ramp 2 Power
17 Ramp 2 Time
18 Soak 2 Time
19 Feed Power
20 Feed Ramp Time
21 Feed Time
22 Idle Power
23 Idle Ramp Time
24 Output (1-4)
25 Source Index
26 Max Power
27 Slew Rate
28 Material
3n Tooling n (n=1 to 8)
Query Measurement:
@QM;<param1>
1n Output n Power (n=1 to 4)
2n Output n Rate
3n Output n Thickness
4n Output n Deviation
5n Sensor n Rate (n=1 to 8)
6n Sensor n Thickness
7n Sensor n Frequency
8n Sensor n % Life