INFICON SID-242 Thin Film Deposition Controller - Manual (Page 51)

Chapter 3 SQS-242 Software
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If Dual Sensor is not selected (i.e. a single sensor), the relay contacts are closed when
you are in a layer with the sensor enabled. As an example, let’s say you have sensors
1 and 3 enabled for Film 1 and sensors 2 and 4 enabled for Film 2. When you start Film
1, the contacts for Sensor Relays 1 and 3 will close. When you start Film 2, these
contacts open and the contacts for Sensor Relays 2 and 4 will close.
If you have the SQS-242 software configured for dual sensors, the operation of these
relays is considerably different. Dual sensors use either Sensor Inputs 1 and 2, or
Inputs 3 and 4. In this case, only Sensor Shutter Relays 1 and 3 have meaning, Relays
2 and 4 are always open. With the relay contacts open, Sensors 1 and 3 are selected.
If a Crystal Fail is detected during the running of a film, the Sensor Shutter Relay’s
contacts will close for the duration of that film. This selects the second sensor in the
Dual Sensor assembly for the remainder of the film.
Xtal All Good and Xtal All Fail Relays
These two relays provide an indication of the general health of your sensors. If the Xtal
All Good Relay is closed, then all enabled sensors are returning a valid reading. If the
Xtal All Fail Relay is closed, none of the enabled sensors are returning a valid reading.
Process Stopped and Running Relays
These relays indicate the overall status of the process. The Process Running relay
closes as soon as Start Process is selected (by front panel or digital input), and opens
when Abort Process is selected. Even if a layer is stopped within a process, the
Process Running relay remains closed until the last film of a process has finished. The
Process Stopped relay contacts behave in the inverse manner.
Process Active
This relay action is similar to the Process Running relay, except it will open if the
process is temporarily halted for any reason, e.g. a Manual Start layer.
Layer Stopped and Running Relays
The Layer Running relay closes as soon as Start Layer is selected (by front panel or
digital input), and opens when Stop Process is selected. The Layer Stopped relay
contacts behave in the inverse manner.
Deposit Phase Relay
This relay indicates that you are in the deposit phase of a film. It is like having the two
Source Shutter Relays connected in parallel. If you have shutter delay enabled, this
relay will wait until the end of the shutter delay before going active.
Pre-Cond Phase Relay
This relay closes for the preconditioning phases (Ramp1, Soak1, Ramp2, Soak2) of a
film.