INFICON SID-242 Thin Film Deposition Controller - Manual (Page 47)

Chapter 3 SQS-242 Software
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3.4.3 Edit: Materials
The Edit Material dialog provides the functions needed to build a materials database. In
addition to the functions listed below, the main screen function keys provide capabilities
to add/edit/delete materials.
Material: Selects a material to edit.
Density: Sets the density for this material. Material density has a significant impact on
deposition calculations.
Z-Factor: Sets the Z-factor, an empirically determined measure of a material’s effect on
quartz crystal frequency change. Z factor has no effect on measurements when using a
new crystal. If the Z Factor for your material is not known, using crystals with >80% life
will eliminate the Z Factor term.
See the Appendix for a list of standard Material Parameters (Density and Z-Factor).