INFICON SID-242 Thin Film Deposition Controller - Manual (Page 39)

Chapter 3 SQS-242 Software
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Hint: To add layers to a process, it is easiest to click an existing layer in the layers
list then click Copy. Click Paste to insert several temporary layers of that type. Next,
assign the proper film to each of the layers, using the Film dropdown box.
When selecting a Film for a codeposition layer, remember that each film must be
assigned to a different source output! To change an existing layer to a CoDep layer,
highlight the existing layer and click “Cut Layer.” Next click the layer desired for
CoDep and click “Paste CoDep” to assign the selected layer. The Multi-Layer
CoDeposition Process section of Chapter 2 illustrates this concept.
Film: Selects the film that is assigned to the selected layer. Changing a layer’s film also
changes the film related parameters for that layer (i.e. preconditioning, PID, material,
etc.)
Initial Rate: Sets the initial deposition rate setpoint for the selected layer. If no rate
ramps are defined for the layer, this is the rate setpoint for the entire layer.
Final Thickness: Sets the endpoint thickness for the selected layer. When final
thickness is reached, deposition is stopped for that layer and the feed/hold phase is
entered.
Time Setpoint: Sets an arbitrary time, after deposition begins, when the time setpoint
relay is activated.
Thickness Limit: Sets an arbitrary thickness when the thickness limit relay is activated.
Auto/Manual Start: Determines whether a layer begins automatically upon completion
of the previous layer. If Manual Start is selected, the previous layer ends at its idle
power and waits for the user to push the Start Layer switch.
Substrate Index: If using a substrate indexer, assigns the substrate to a specific angle
or placement value (0-15). These values are sent to the digital I/O PLC at the beginning
of each layer for interfacing to a specific indexer. See System Setup and Digital I/O for
other settings that pertain to the substrate index.