INFICON SID-242 Thin Film Deposition Controller - Manual (Page 43)

Chapter 3 SQS-242 Software
3-13
Condition Tab
Before deposition begins, it is often necessary to precondition the source material.
This places the system at the proper power level to achieve rapid PID control when
deposition begins.
Ramp 1: Ramp power sets the power level that is desired at the end of the ramp phase,
in % of full scale. Ramp time sets the time to ramp with a linear rate from the initial
power to the Ramp power. Soak time sets the time the output remains at the ramp
power level.
Ramp 2: Ramp 2 functions are the same as Ramp 1. Typically, Ramp 2 power is set
near the power level required to match the desired initial deposition rate.
Feed: The feed phase holds output power at the level and time required to wire feed
new material.
Idle: The Idle phase ramps the material to a state that is ready for deposition, typically
the same as Ramp 2 power.