INFICON SID-242 Thin Film Deposition Controller - Manual (Page 21)

Chapter 2 Quick Start
2-9
2.5 Single-Layer Process Simulation
If you have followed this chapter, you are ready to simulate a deposition process.
Setup
Displays Click the “View” menu and assure that these options are
selected: Film Settings, Film Readings, and Automatic. Note
that the settings “ribbon” along the right displays the pre-
conditioning parameters you entered in the previous section.
Start
Process Verify that the top SoftKey label displays “START SIMULATE.”
If “START PROCESS” is displayed, follow the instructions at
the end of Section 2.2 to enable simulate mode. Press the
“START SIMULATE” SoftKey, or click the label, to start the
process.
The process will start with preconditioning (i.e. Ramp1, Soak1, Ramp2, Soak2) as
shown below. Once preconditioning is complete, the process will enter the Deposit
phase. You may want to select “ABORT SIMULATE,” then “START SUMULATE”
several times to familiarize yourself with the on-screen displays during preconditioning.
You may also want to use the settings ribbon to adjust parameters while the process is
running.
Preconditioning Phases
Because we selected “Automatic,” in the View menu, the graph displays Output Power
during preconditioning, then switches to Rate during the deposition phase.