INFICON SID-242 Thin Film Deposition Controller - Manual (Page 86)

Chapter 6 Computer Interface
6-5
CalcChkSum = Hex$(FCS)
6.5 Command Summary
Note: Update Queries (except UP02-UP10) are only valid in Stop Mode
Query Process: @QP;<param1>
(Query)
@QP;O6;Respo
nse (ACK
Response)
@QP;21;ErrNu
m
(NAK
Response)
<param1>
01
Process Name
@QP;01
(Query Process)
@QP;06;MyProc (Process is
MyProc)
02
Process Time
@QP;02
(Query Process Time)
@QP;06;32:45 (Time is 32 min.,
45 sec.)
03
Layer
@QP;03
(Query Process Layer)
@QP;06;1
(Layer is Layer 1)
04 Layer Time
05 Phase
(Phase numbers are shown below)
00 Application Startup
09 ShutterDelay Phase
01 Program Initializing
10 Deposit Phase
02 Not Used
11 Layer Stopped