INFICON SID-242 Thin Film Deposition Controller - Manual (Page 59)

Chapter 3 SQS-242 Software
3-29
3.6 Software Specifications
Display
Graphs ................................................................................. Rate, Deviation, Power
Readouts .............................................................................. Rate,Dev,Thick,Power
Process Parameters
Name .................................................................................... 12 characters
# Processes ......................................................................... Unlimited
# Layers ............................................................................... Unlimited
# Sensors (Dual) .................................................................. 1 to 8 (4 Dual)
# Sources ............................................................................. 1 to 4
Layer Parameters
Start Mode ............................................................................ Auto/Manual
Rate ...................................................................................... 0.0 to 999.9
/sec.
Thickness ............................................................................. 0.0 to 999.9

Thickness Limit .................................................................... 0.0 to 999.9

Time Setpoint ....................................................................... 0 to 30000 sec.
# Rate Ramps ...................................................................... Unlimited
Rate Ramp Start................................................................... 0.0 to 999.9

Rate Ramp Time .................................................................. 0 to 1000 sec.
New Rate ............................................................................. 0.0 to 999.9
/sec.
Substrate Index .................................................................... 0 to 15
Film Parameters
Name .................................................................................... 12 characters
Ramp Time (1,2) .................................................................. 0 to 30000 sec.
Soak Power (1,2) ................................................................. 0.0 to 100.0 %
Soak Time (1,2) .................................................................... 0 to 30000 sec.
Shutter Delay Time ............................................................... 0 to 200 sec.
Shutter Delay Error ............................................................... 0.0 to 30.0 %
P Term ................................................................................. 1 to 9999
I Term ................................................................................... 0 to 99.9 sec.
D Term ................................................................................. 0 to 99.9 sec.
Control Error ......................................................................... Ignore/Stop/Hold
Control Error Set .................................................................. 0 to 30.0 %
Feed Ramp Time.................................................................. 0 to 30000 sec.
Feed Power .......................................................................... 0.0 to 100.0 %
Feed Time ............................................................................ 0 to 30000 sec.
Idle Ramp Time .................................................................... 0 to 30000 sec.
Idle Power ............................................................................ 0.0 to 100.0 %
Tooling (Sensor 1 to 8) ......................................................... 10.0 to 999.0
Max Power ........................................................................... 0.0 to 100.0 %
Slew Rate ............................................................................. 0.0 to 100.0 %/sec.
Source Index (Pocket) .......................................................... 0 to 15