INFICON SID-242 Thin Film Deposition Controller - Manual (Page 45)

Chapter 3 SQS-242 Software
3-15
In codeposition, a layer may have multiple films, with each material using a different
output and sensor(s) for control. However, no layer can have the same output assigned
to more than one film. If you try to assign the same output to multiple films in a layer, an
error message will be displayed. Reassigning a film to a different output to eliminate
this error may impact other stored processes. If the change would create an output
conflict in another process, an error message is displayed.
Sensor Tooling: Adjusts for sensor measured deposition rates that differ from the
substrate deposition rate. A higher tooling value yields higher rates. For example, if the
sensor sees only 50% of the substrate rate, set the value to 200%. Setting Tooling to
0% causes a sensor to be ignored for this film.