INFICON SID-242 Thin Film Deposition Controller - Manual (Page 58)

Chapter 3 SQS-242 Software
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3.5 View Menu
The view menu controls the appearance of the main display.
Film Settings: Displays/hides a ribbon of commonly accessed process settings along
the right of the screen. Additional process parameters are available in the Edit menu.
When displayed, the settings ribbon allows the user to easily modify process settings
during deposition without leaving the main screen. Changes are made to the current
process and the process database immediately. In codeposition, first click on the
desired film to display its parameters.
Film Readings: Displays/hides film deposition readings along the bottom of the screen.
Readouts of Film, Rate, Deviation, Thickness, and Power are displayed simultaneously
for each of the active outputs. The rate, deviation, and thickness readings displayed
represent an average of the quartz sensors assigned to each film.
Sensor Readings: Displays/hides a pop up window of sensor rate, thickness,
remaining life, and frequency readings. Unlike the main screen’s Film Readings, this
display is the raw data coming from each sensor. In addition, the output (i.e. PID
control loop) that each sensor is assigned to is displayed. Sensor assignments are
established in the SQM-242 Setup menu.
Rate Graph: Fixes the main graph to deposition rate. Deposition rate is useful during
the shutter delay, rate ramp, and deposition phases. During other phases, the power
output graph is usually more useful.
Deviation Graph: Fixes the main graph to display percent deviation from the rate
setpoint. Rate deviation is useful for fine tuning the PID control loop.
Power Graph: Fixes the main graph at output power. Output power is directly adjusted
during the preconditioning, feed, and hold phases. Output power is also useful during
the deposition phases to detect error conditions, which cause oscillations. Be sure the
Full Scale voltage is set properly in the SQM-242 Setup menu.
Automatic: Changes the main graph to display the most pertinent information for each
deposition phase. During preconditioning, output power is displayed. During shutter
delay, rate ramps, and deposition, the main graph displays deposition rate. During feed
and hold phases, the graph reverts to output power.