INFICON SID-242 Thin Film Deposition Controller - Manual (Page 79)

Chapter 5 Digital IO
5-6
Source Done
Flag (read at start of each layer)
1=
Source
Indexer Done, 0=Not Done
222
Outputs
1-16
Bit 0 is Relay 1,
etc.
224
Inputs
1-12
Bit 0 is Input 1,
etc.
225
Substrate
Index
used by layer
Bits 0-3 are BCD
of substrate index
226
Substrate
Done
Flag (read at start of each layer)
1=
Substrate
Indexer Done, 0=Not Done