Chapter 3 sqs-242 software – INFICON SID-242 Thin Film Deposition Controller User Manual

Page 54

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Chapter 3 SQS-242 Software

3-24

SQM-242 Tab


Normal/Simulate
: In Normal mode, the SQS-242 gets readings from the SQM-242
card(s). In Simulate mode, the SQS-242 generates simulated readings even if a card is
not installed. Useful for testing new processes and learning the software.

Note: In Simulate Mode, a deposition rate is not “measured” until the output power
exceeds 50%.

Period: Sets the measurement period between .2 seconds (5 readings per second) and
2 seconds. A longer period gives higher reading accuracy, especially at low rates.

Filter: Sets the number of readings used in the reading filter. A low setting gives rapid
response to process changes, high settings give smoother graphs.

Address: Sets the address of the SQM-242 ISA card in the computer’s address space.
See the SQM-242 Chapter of this manual for detailed setup instructions.

Interrupt: Sets the interrupt used by the SQM-242 ISA card. See the SQM-242
Chapter of this manual for detailed setup instructions.

Slave Enabled: When a second SQM-242 card is present, it enables/disables sensors
5-8 and outputs 3 and 4.

Front Panel Enabled: When used with the SRC series computer, enables/disables the
SQS-242 software to read the SoftKeys and setting knob.

SQM-242 Revision: Firmware revision of the SQM-242 card.

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