INFICON SID-242 Thin Film Deposition Controller - Manual (Page 52)

Chapter 3 SQS-242 Software
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Soak Hold Phase Relay
This relay closes for the Soak and Hold phases after deposition.
Manual Mode Relay
Closes when the program is placed in Manual mode.
Max Power Relay
Closes when any control voltage output is at the programmed maximum power level.
Thickness Setpoint Relay
This relay will become active when the Thickness Setpoint is reached. This is a
programmable process parameter.
Time Setpoint Relay
This relay will become active when the Time Setpoint has been reached. This is
measured from the beginning of the deposit phase, and is a programmable parameter.
Input Events: The input events dropdown box lists the deposition events that can be
caused by an external digital input. To assign a deposition event to an input, click the
Input #, then select the desired event from the dropdown box. As you click each Input#,
the dropdown will change to show its currently assigned event. A brief description of
each input event follows:
Start Process Input
Triggering this input is the same as pushing the Start Process button.
Abort Process Input
Triggering this input will abort the process.
Start Layer Input
Triggering this input will start or restart the current layer.
Stop Layer Input
Triggering this input will stop the current layer.
Start Next Layer Input
Triggering this input will skip the current layer and start the next layer.
Zero Thickness Input
This will zero the thickness. It is identical to pressing the Zero Button.
Force Final Thickness Input
Triggering this input has the same as effect reaching Final Thickness setpoint.