INFICON SID-242 Thin Film Deposition Controller - Manual (Page 88)

Chapter 6 Computer Interface
6-7
(NAK
Response)
<param1>
01
Set Process
@UP;01;MyProc
(Select MyProc)
@UP;06;
02 Start Process
@UP;02
@UP;06
03 Stop Process
04 Start Layer
05 Stop Layer
06 Start Next layer
07 Auto Mode
08 Manual Mode
09 Zero Thickness
10 Force Final Thickness
2n Output n Power (Manual Mode Only)
@UP;21;50
(Set Output 1 to 50%)
Query/Update Layer:
@QL;<param1>;<layer>;<output>
@UL<param1>;<layer>;<output>;<value>
<param1>
01 Film Name (Example: Set
Layer 1, Output 1 film to My Film)
@UL;01;1;1;MyFilm
02
Material
03 Start Rate (A/s)
04 Start Thickness (kA)
05 Time SP (mm:ss)
06 Thickness SP (kA)
07 Start Mode (0/1)
08 Substrate Index (0 to 15)
1n Ramp n Start Thickness (n=1 to 9)
2n Ramp n Ramp Time (n=1 to 9)
3n Ramp n New Rate (n=1 to 9)
Query/Update Film:
@QF;<param1>;<layer>;<output>