INFICON SID-242 Thin Film Deposition Controller - Manual (Page 87)

Chapter 6 Computer Interface
6-6
03 Not Used
12 Layer Starting
04 Process Stopped
13 Not Used
05 Ramp1 Phase
14 Feed Ramp Phase
06 Soak1 Phase
15 Feed Hold Phase
07 Ramp2 Phase
16 Idle Ramp Phase
08 Soak2 Phase
17 Idle Phase
06 Phase Time
07 Run #
08 All Process Names (returns comma delimited list)
1n Source Shutter, n=1 to 4
(0=Open, 1 =Close)
@QP;12
(Query Source Shutter 2)
@QP;06;0
(Source Shutter 2 is Open)
2n Sensor Shutter, n=1 to 8
(0=Open, 1 =Close)
30 All Crystal Good
(0=False, 1=True)
3n Crystal n Good, n=1 to 8
(0=False, 1 =True)
39 All Crystal Fail
(0=False, 1=True)
Update Process:
@UP;<param1>;<data>
(Update)
@UP;O6;Respo
nse (ACK
Response)
@UP;21;ErrNu
m