INFICON MDC-360 Thin Film Deposition Controller - Manual (Page 115)

MDC-360 DEPOSITION CONTROLLER
9-3 SYSTEM INSTALLATION
drawer with the full electrode side down and the pattern electrode side up. Make
tom of the drawer. Install the retainer
clip by gently pressing it onto the drawer. The retainer clip should snap into the
be fully engaged onto the drawer housing.
astic
sure the crystal is properly seated in the bot
drawer. All three retaining legs must
Replace the drawer into the sensor housing. The drawer should slide in easily and
snap into place.
Removal and replacement of sensor crystals should be performed in a clean
environment. An isolated clean work bench is recommended for crystal
replacement. To prevent crystal contamination, use clean lab gloves or plastic
tweezers when handling the crystal and keep the new crystals in a closed pl
case. When handling the drawer always hold it by the edges to avoid touching the
crystal surface.
9.6 TYPICAL SYSTEM INSTALLATION
A typical system installation is shown in Figure 9-5. Installation can vary
depending on the application