INFICON MDC-360 Thin Film Deposition Controller - Manual (Page 61)

MDC-360 DEPOSITION CONTROLLER
4-29 PROGRAMMING AND CONTROLLER SETUP
4.3.3.3.2 CONDITION TYPES
e:
Soak Rise
Rate Ramp 1
Deposit 2
Rate Ramp 2
Deposit 3
Rate Ramp 3
Deposit 4
Rate Ramp 4
eposit 5
amp To Feed
eed
Material
Sensor
Source
Condition Input
Type:
Process
Crystal
Pocket
Layer Number: >005<
States - State conditions are evaluated true whenever the controller is in the
respective state. Controller States ar
Process Ready
Start Layer
Change Pocket
Change Crystal
Layer Ready
Soak Hold
Predeposit Rise
Predeposit Hold
Establish Rate
Deposit 1
D
R
F