INFICON MDC-360 Thin Film Deposition Controller User Manual

Page 47

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MDC-360 DEPOSITION CONTROLLER

4-15

PROGRAMMING AND CONTROLLER SETUP

1 to confirm and 0 to cancel the change. Each time you want to edit this proces
you will be asked to enter

s,

the correct password. Once a password has been

is parameter will not be displayed until the password has been entered

you must remember your

users from viewing

, move the cursor onto the Edit password field, type in your password

then press the Enter key. A message will pop up asking for verification to change
the password. Press 1 to confirm and 0 to cancel the change. Each time you want
to view or run this process, you will be asked to enter this password. Please note
that the view function of this password is ignored if the Edit Password is not set.
Once a password has been entered, this parameter will not be displayed until the
password has been entered again.

The default for this parameter is '0000'.

Please note that once the password has been changed, the process cannot be
viewed or run unless the correct password is entered so you must remember
your passwords.

This column shows the layer number in the process. Please note that with the

n copy or delete this layer.

This parameter defines the desired thickness for the layer. The default for this
parameter is 0.000 Kang.

arameter defines the material for this layer. The layer material is selected

aterials defined in View/Edit m

all of the necessary materials for the process before defining the process.

DIT MATERIAL PASSWORD sectio

lect a material, move the cursors to th

al parameter for that layer and

press the Right-arrow key. The Select Layer Material screen will be displayed as
shown below. Scroll to the desired material and press Enter.

The layer material defaults to 'End Layer' meaning this layer marks the end of the
process.

entered, th
again.

The default for this parameter is '0000'.

Please note that once the password has been changed, the process cannot be
modified unless the correct password is entered so
passwords.

View/Run Password (four character alphanumeric field)

The View/Run process password allows you to lock out other
and/or running a process unless the correct password is known. To set this
password

Layer (000 to 999)

cursors on a layer number you ca

Thickness (000.0 to 999.9)

Material

This p
from the list of m

aterial. Therefore, you should

define
See E

n 4.3.2.

To se

e materi

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