Material #1 parameters, Material #1 parameters -2 – INFICON MDC-360 Thin Film Deposition Controller User Manual
Page 26
MDC-360 DEPOSITION CONTROLLER
3-2
BENCH CHECKOUT & INSPECTION
3.3.1
MATERIAL #1 PARAMETERS
Material Name
Cr
Sensor #
1
Crystal #
1
Source #
1
Pocket #
1
Material Density
07.20 gm/cm
3
Acoustic Impedance
28.95 gm/cm
2
sec
Tooling Factor
70 %
Proportional gain
2400
Integral Time constant
99.9
Derivative Time constant
0.00
Rise to Soak Time
0:00:10 H:MM:SS
Soak Power
5 %
Soak Time
0:00:10
Rise to Predeposit Time
0:00:10
Predeposit Power
9.5 %
Predeposit Time
0:00:05
Rate Establish Time
0 sec
Rate Establish Error
0 %
Deposition Rate #1
10.0 Å/sec
Rate Ramp Start (1 to 4)
999.9 KÅ
Rate Ramp Stop (1 to 4)
999.9 KÅ
Time Setpoint
0
Ramp to Feed Time
0:00:05
Feed Power
7 %
Feed Time
0:00:10
Ramp to Idle Time
0
Idle Power
0
Maximum Power
20 %
Power Alarm Delay
5 sec
Minimum Power
0 %
Rate Deviation Attention
0 %
Rate Deviation Alarm
0 %
Rate Deviation Abort
0 %
Sample Dwell %
100.0 %
Sample Period
0
Crystal Fail
Time Power
Backup Sensor #
1
Backup Tooling Factor
100
Backup Crystal #
1
Material Password
0000