INFICON MDC-360 Thin Film Deposition Controller - Manual (Page 26)

MDC-360 DEPOSITION CONTROLLER
3-2 BENCH CHECKOUT & INSPECTION
3.3.1 MATERIAL #1 PARAMETERS
Material Name Cr
Sensor # 1
Crystal # 1
Source # 1
Pocket # 1
Material Density 07.20 gm/cm
3
Acoustic Impedance 28.95 gm/cm
2
sec
Tooling Factor 70 %
Proportional gain 2400
Integral Time constant 99.9
Derivative Time constant 0.00
Rise to Soak Time 0:00:10 H:MM:SS
Soak Power 5 %
Soak Time 0:00:10
Rise to Predeposit Time 0:00:10
Predeposit Power 9.5 %
Predeposit Time 0:00:05
Rate Establish Time 0 sec
Rate Establish Error 0 %
Deposition Rate #1 10.0 Å/sec
Rate Ramp Start (1 to 4) 999.9 KÅ
Rate Ramp Stop (1 to 4) 999.9 KÅ
Time Setpoint 0
Ramp to Feed Time 0:00:05
Feed Power 7 %
Feed Time 0:00:10
Ramp to Idle Time 0
Idle Power 0
Maximum Power 20 %
Power Alarm Delay 5 sec
Minimum Power 0 %
Rate Deviation Attention 0 %
Rate Deviation Alarm 0 %
Rate Deviation Abort 0 %
Sample Dwell % 100.0 %
Sample Period 0
Crystal Fail Time Power
Backup Sensor # 1
Backup Tooling Factor 100
Backup Crystal # 1
Material Password 0000