INFICON MDC-360 Thin Film Deposition Controller User Manual
Page 127
MDC-360 DEPOSITION CONTROLLER
10-7
THEORY OF OPERATION
Manganese
Mn
7.20
23.42
Manganese (II) Sulfide
9.39
MnS
3.99
Mercury Hg
13.46
11.93
Molybdenum Mo
10.20
34.36
Nickel Ni
8.91
26.68
Niobium Nb
8.57
17.91
Palladium Pd
12.00
24.73
Platinum Pt
21.40
36.04
Potassium Chloride
KC
1.98
4.31
Rhenium Re
21.04
58.87
Rhodium Rh
12.41
42.05
Samarium Sm
7.54
9.92
S
Sc
3.0
candium
9.70
Selenium Se
.82
10.22
4
Silicon Si
2.32
12.40
Silicon (II) Oxide
2.13
10.15
SiO
Silicon Dioxide (fused quartz)
2.2 8.25
SiO
2
Silver Ag
10.50
16.69
Silver Bromi
6.47
7.48
de
AgBr
Silver Chlori
5.56
6.69
de
AgCl
Sodium Na
0.97
1.84
Sodium Chloride
NaCl
2.17
5.62
Strontium Sr
2.620
----
Sulphur S
2.07
3.86
Tantalum Ta
16.60
33.70
Tantalum (IV) Oxide
Ta
2
O
5
8.2 29.43
Tellurium Te
6.25
9.81
Terbium Tb
8.27
13.38
Thallium Tl
11.85
5.70
Tin
7.30
12.20
Sn
Titanium Ti
4.50
14.06
Titanium (IV) Oxide
2
4.26 22.07
TiO
Tungsten W
19.30
54.17
Tungsten Carbide
WC
15.60
58.48
Uranium U
18.70
37.10
Vanadium V
5.96
16.66
Ytterbium Yb
6.98
7.81
Yttrium Y
4.34
10.57
Zinc Zn
7.04
17.18
Zinc Oxide
ZnO
5.61
15.88
Zinc Selenide
ZnS
5.26
12.23
Zinc Sulfide
ZnS
4.09
11.39
Zirconium Zr
6.51
14.72