INFICON MDC-360 Thin Film Deposition Controller - Manual (Page 77)

MDC-360 DEPOSITION CONTROLLER
5-3
5.5 STATUS DISPLAYS
There are six different run time status screens that can be displayed at any time
pressing the Status key (providing they have each been enabl by
ed using Edit
n
Display Setup). The first key press will bring up the last viewed status screen,
repeatedly pressing the Status key will cycle through the six status screens, show
below.
OPERATING THE MDC-360
Figure 5-3 Rate vs. Time Graph
Figure 5-4 Rate Deviation vs. Time graph
Figure 5-5 Thickness vs. Time Graph
Sample Cr Process Ready
10
R
a
t
e
0 1
Sample Cr Process Ready
20
R D
a e
t v 1
e %
0
Sample Cr Process Ready
999
T
h
i
c
k
0 1
Displays the current
process name.
Displays the current
material name.